System for mapping wafers using predictive dynamic lighting
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United States of America Patent
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-
Nov 30, 2004
Grant Date -
N/A
app pub date -
Jul 8, 2002
filing date -
Jul 13, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer mapping system includes an imaging array, at least one lighting module and a controller coupled to the imaging array and the lighting module. The controller is adapted to receive information relative to an initial acquired wafer image and adjust illumination from the lighting module based upon the initial acquired wafer image, and acquire a subsequent wafer image using the adjusted illumination.
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