Vibration isolator, device manufacturing apparatus and method, semiconductor manufacturing plant and method of maintaining device manufacturing apparatus
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United States of America Patent
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Nov 30, 2004
Grant Date -
Oct 3, 2002
app pub date -
Mar 22, 2002
filing date -
Mar 27, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A vibration isolator includes a vibration isolation platform, a vibration sensor installed on the vibration isolation platform, and an angle sensor for sensing an inclination angle of the vibration isolation platform. A detection signal from the vibration sensor is corrected based upon an output from the angle sensor, and the corrected detection signal is used in order to suppress vibration of the vibration isolation platform.
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