Method and measuring arrangement for detecting an object

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United States of America Patent

PATENT NO 6825939
APP PUB NO 20030011762A1
SERIAL NO

10186664

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Abstract

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The present invention relates to a method and a measurement apparatus for detection of a specimen (1), a specimen (1) being illuminated with a light source (2) and imaged with the aid of an imaging optical system (3) onto a detector (4) preferably embodied as a CCD camera, and the specimen (1) being detected repeatedly with the detector (4). With the method and the measurement apparatus according to the present invention, fluctuations in the statistical analysis of detected signals or data can be minimized, the detected signals or data being subject to detection-related error sources. The method and the measurement apparatus according to the present invention are characterized in that the detection time of the detector (4) for the individual detections and/or the intensity of the light serving for specimen illumination are varied.

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Patent Owner(s)

Patent OwnerAddress
LEICA MICROSYSTEMS SEMICONDUCTOR GMBHGERMANY WETZLAR WETZLAR HESSIAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rinn, Klaus Heuchelheim, DE 23 258

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