Micromirror systems with electrodes configured for sequential mirror attraction

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6825968
APP PUB NO 20040070813A1
SERIAL NO

10269763

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Abstract

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Micromirror devices, especially for use in digital projection are disclosed. Other applications are contemplated as well. The devices employ a superstructure that includes a mirror supported over a hinge set above a substructure. Various improvements to the superstructure over known micromirror devices are provided. The features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein, possibly offering cost savings, lower power consumption, and higher resolution.

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Patent Owner(s)

Patent OwnerAddress
SK HYNIX INCGYEONGGI DO SOUTH KOREA GYEONGGI-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aubuchon, Christopher M Palo Alto, CA 11 203

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