Forming conductive posts by selective removal of conductive material

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United States of America Patent

PATENT NO 6826827
SERIAL NO

09707452

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Abstract

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A method of fabricating interconnection members for a microelectronic device. An electrically conductive sheet having a uniform thickness is coupled to a first surface of a support substrate. Portions of the conductive sheet are selectively removed so as to leave a plurality of substantially rigid, elongated posts protruding parallel to one another from surface of the support substrate.

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Patent Owner(s)

Patent OwnerAddress
TESSERA INC3025 ORCHARD PARKWAY SAN JOSE CA 95134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fjelstad, Joseph C Sunnyvale, CA 86 2020

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