Adhesive-sealed window lid for micromechanical devices
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United States of America Patent
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Dec 7, 2004
Grant Date -
N/A
app pub date -
Dec 29, 1998
filing date -
Dec 31, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An improved spatial light modulator package comprising a spatial light modulator 1006 attached to a central region of a substrate 1004, a sealing ring 1002 on said substrate 1004 around the central region thereof, a window frame 402 attached to the sealing ring 1002, and a window 404 glued to the window frame 402. Gluing the window 404 to the window frame 402 avoids distortion of the glass that occurs when the window is heat bonded to the window frame, and avoids having to grind and polish the glass window after it is bonded to the window frame.
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