Chemical treating apparatus
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United States of America Patent
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Dec 7, 2004
Grant Date -
Jul 31, 2003
app pub date -
Jan 28, 2003
filing date -
Jan 31, 2002
priority date (Note) -
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Abstract
A chemical treating apparatus for performing a predetermined treatment of a principal surface of a substrate by delivering a treating solution thereto. The apparatus includes a treating solution delivery nozzle for delivering the treating solution to the principal surface of a substrate. The nozzle has a treating solution reservoir adjacent a tip end thereof for storing the treating solution. A temperature control device holds the treating solution reservoir to control the temperature of the treating solution in the treating solution reservoir through heat exchange with the treating solution.
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