Nanoimprinting apparatus and method
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United States of America Patent
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Dec 14, 2004
Grant Date -
Nov 18, 2004
app pub date -
May 16, 2003
filing date -
May 16, 2003
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A nanoimprinting apparatus for imprinting nanostructure on a workpiece. The apparatus comprises a frame, a platen, an embossing tool, and a separating tool. The platen is connected to the frame for separating the workpiece. The embossing tool is connected to the frame for imprinting nanostructure on the workpiece. The separating tool is connected to the frame for separating the workpiece and embossing tool. The separating tool has a workpiece engagement surface for engaging the workpiece when separating the workpiece and embossing tool. The embossing tool extends through the separating tool.
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