Substrate treating apparatus and method
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United States of America Patent
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Dec 21, 2004
Grant Date -
Jan 8, 2004
app pub date -
Jun 9, 2003
filing date -
Jun 11, 2002
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A series of substrate transport paths for transporting substrates is arranged on upper and lower stories. Substrates are transferable between the substrate transport path on the first story and the substrate transport path on the second story. The paths include a going-only path for transporting the substrates forward, and a return-only path for transporting the substrates in the opposite direction, these paths being arranged on the upper and lower stories. An indexer connects one end of the substrate transport path on one story to one end of the substrate transport path on the other story. An interface connects the other end of the substrate transport path on one story to the other end of the substrate transport path on the other story. This construction efficiently reduces a waiting time due to interference between the substrates transported along the going-only path and the substrates transported along the return-only path.
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