Method for high precision printing of patterns
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United States of America Patent
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Dec 21, 2004
Grant Date -
Dec 16, 2004
app pub date -
Jun 12, 2003
filing date -
Jun 12, 2003
priority date (Note) -
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Abstract
An aspect of the present invention includes a method to print pattern with improved edge acuity. In one embodiment a method for printing fine patterns comprising the actions of: providing an SLM and providing a pixel layout pattern with different categories of modulating elements, the categories differing in the phase of the complex amplitude. Other aspects of the present invention are reflected in the detailed description, figures and claims.
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