Tooling fixture for packaged optical micro-mechanical devices
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United States of America Patent
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Dec 21, 2004
Grant Date -
Jan 30, 2003
app pub date -
Jul 24, 2001
filing date -
Jul 24, 2001
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A tooling system for handling optical micro-mechanical devices. A tooling fixture is attached to the MEMS die, preferably before the optical micro-mechanical devices are released. The tooling fixture does not interfere with removal of the sacrificial material, facilitates handling of the MEMS die and ultimately becomes an integral part of the packaged optical micro-mechanical device. The tooling fixture can be a heat sink, a compliant thermally conductive material and/or a tooling post.
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