Method and apparatus for pulse-position synchronization in miniature structures manufacturing processes
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United States of America Patent
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Dec 28, 2004
Grant Date -
Aug 21, 2003
app pub date -
Mar 20, 2003
filing date -
Jan 19, 2001
priority date (Note) -
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Abstract
Pulse-position synchronized deposition of a material in miniature structure manufacturing processes is carried out in a fabrication tool including a material carrier element, a source of energy generating pulses of energy, a substrate, and a control unit operatively coupled to the source of energy, substrate, and the material carrier element. The control unit exposes a first area of the material carrier element to a first pulse of energy, pauses the exposure while initiating relative motion between the source of energy and the substrate at a predetermined first speed and relative motion between the material carrier element and the energy source at a predetermined second speed which is a function of the first speed, and slowing (or stopping) relative motion between the energy source, material carrier element, and the substrate, while exposing the unablated area of the material carrier element adjacent to previously ablated area to a second pulse of energy.
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