Electrostatically actuated valve
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United States of America Patent
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-
Jan 4, 2005
Grant Date -
Dec 25, 2003
app pub date -
Jun 19, 2002
filing date -
Jun 19, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electrostatically actuated valve that is relatively small, has relatively low fabrication costs, and consumes relatively low voltage and/or power. Normally closed, normally open, three (or more) way valves, and other configurations are contemplated. These electrostatically actuated valves are suitable for a wide variety of applications, including but not limited to, low power and wireless applications, for example.
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