Method of processing PFC and apparatus for processing PFC
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jan 4, 2005
Grant Date -
Mar 21, 2002
app pub date -
Mar 13, 2001
filing date -
Mar 13, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates to a method and an apparatus for processing PFC, which does not damage a vacuum pump, and in which maintenance and inspection works are readily performed, and an incineration process is not required. The processing apparatus 10 is constructed with a vacuum chamber 12, and a vacuum pump 16, a reaction gas introduction section 17, a plasma process section 18 and a polymer collection section 20 that are successively disposed through a piping 14 in a succeeding stage of the vacuum chamber 12.
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