Vent for an optical pellicle system
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United States of America Patent
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Jan 11, 2005
Grant Date -
Mar 4, 2004
app pub date -
Aug 27, 2002
filing date -
Aug 27, 2002
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention provides an optical pellicle system which includes a frame having a top side and bottom side, a pellicle membrane configured to cover the top side of the frame, a photomask to which the bottom side of the frame is mounted, and at least one venting slot defined in the photomask, extending under the frame from an area defined within the frame to an area outside of the frame.
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