System and method for measuring an optical path difference in a sensing interferometer
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United States of America Patent
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Jan 11, 2005
Grant Date -
Apr 22, 2004
app pub date -
Oct 16, 2002
filing date -
Oct 16, 2002
priority date (Note) -
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Abstract
An apparatus and a method of measuring an optical path difference in a sensing interferometer. Light from a source is directed in the sensing interferometer. The light reflected from the sensing interferometer is splitted into first and second beams respectively directed into two reference interferometers having optical path differences greater than the coherence length of the source and such that the optical signals are in quadrature. The intensities of the light transmitted by the reference interferometers and recombined light reflected from the reference interferometers are detected for measuring the optical path difference in the sensing interferometer. Additional light sources allow for correction of internal perturbations and absolute measurement of the optical path difference in the sensing interferometer.
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