Continuously variable analog micro-mirror device
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United States of America Patent
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Jan 18, 2005
Issued Date -
N/A
app pub date -
Oct 1, 2003
filing date -
Oct 28, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micro-mirror device includes a substrate, a reflective element spaced from the surface of the substrate, a pair of electrodes disposed adjacent to the surface of the substrate, spaced apart from each other, and disposed adjacent to opposite ends of the reflective element, and including a dielectric liquid disposed at least between the reflective element and the pair of electrodes. The reflective element is adapted to be positioned at any position within a continuous range between a first position and a second position in response to analog electrical signals applied to the pair of electrodes.
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