Spatial light modulators with light absorbing areas
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United States of America Patent
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Jan 18, 2005
Grant Date -
May 27, 2004
app pub date -
Nov 26, 2002
filing date -
Nov 26, 2002
priority date (Note) -
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Abstract
A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.
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