Multibeam laser drilling apparatus
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United States of America Patent
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Feb 1, 2005
Issued Date -
N/A
app pub date -
Dec 22, 2003
filing date -
Dec 26, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
Provided is a multi-beam laser drilling apparatus for drilling a workpiece, simultaneously at two positions while telecentric errors are suppressed, in which a conventional optical system in which galvanometer mirrors are used for a first laser beam, and a galvanometer-mirror system is located close to an f.theta. lens in order to prevent occurrence of telecentric error. A second laser beam which has been deflected by a second galvanometer-mirror system, transmits through a polarized beam mixers and is incident upon the first galvanometer-mirror system and the f.theta. lens, and accordingly, the workpiece is drilled simultaneously at two positions with the use of both first and second laser beams.
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Cited Art Landscape
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