Edge detection apparatus and method
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United States of America Patent
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Feb 1, 2005
Grant Date -
Jul 29, 2004
app pub date -
Jan 28, 2003
filing date -
Jan 28, 2003
priority date (Note) -
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Abstract
An edge detection apparatus for detecting an edge on a surface. The apparatus comprises a source of coherent radiation for generating a radiation beam and directing the beam onto the surface. A radiation detector is located so as to detect radiation diffusely reflected, but not specularly reflected, from the surface. A system is provided for causing relative scanning movement between the radiation beam and the surface. A monitor is coupled to the detector for monitoring the intensity of the detected radiation.
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