Flexural plate wave sensor and array
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United States of America Patent
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Feb 8, 2005
Grant Date -
Oct 30, 2003
app pub date -
Dec 19, 2002
filing date -
Mar 20, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
A method for manufacturing a flexural plate wave sensor includes the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over the etch stop layer, depositing a piezoelectric layer over the membrane layer, forming a first transducer on the piezoelectric layer and forming a second transducer on the piezoelectric layer, spaced from the first transducer. The method further includes the steps of etching a cavity through the substrate, the cavity having substantially parallel interior walls, removing the portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer, and depositing an absorptive coating on the exposed portion of the membrane layer.
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