Evaporation method and manufacturing method of display device
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United States of America Patent
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Feb 8, 2005
Grant Date -
Sep 25, 2003
app pub date -
Mar 3, 2003
filing date -
Mar 1, 2002
priority date (Note) -
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Abstract
A glass substrate and a shadow mask are put tightly together by inserting the glass substrate between a magnet and the shadow mask made of magnetic material. A pattern forming of an organic EL device is performed by depositing an organic EL material on the surface of the glass substrate from an evaporation source through an opening portion in the shadow mask. A coarsening processing has been performed on the surface of shadow mask facing the glass substrate. This suppresses the damage on the substrate surface by the shadow mask during the evaporation processing.
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