Intensive machine for performing a plurality of processes in fabrication of multilayer substrate
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United States of America Patent
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Feb 15, 2005
Grant Date -
Oct 21, 2004
app pub date -
Aug 22, 2003
filing date -
Aug 23, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An object of the present invention is to provide an intensive machine performing a plurality of processes in a series of steps of fabricating a multilayer substrate. In order that the object may be achieved, the invention provides an intensive machine including an intensive platform installed in a direction in which a ceramic green sheet is fed out of a roll by a feeding apparatus. An adsorbing and conveying table is installed on the platform for conveying the sheet while the sheet is adsorbed and held by an air suction force. On the intensive platform are installed a via hole forming apparatus, via hole inspecting apparatus, filling and printing apparatus, filling and printing apparatus, filling and printing inspecting apparatus and wiring pattern printing apparatus arranged in the sheet conveying direction.
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