Process of direct growth of carbon nanotubes on a substrate at low temperature
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United States of America Patent
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Feb 15, 2005
Grant Date -
Sep 25, 2003
app pub date -
Sep 10, 2002
filing date -
Mar 25, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Carbon nanotubes are directly grown on a substrate surface having three metal layers thereon by a thermal chemical vapor deposition at low-temperature, which can be used as an electron emission source for field emission displays. The three layers include a layer of an active metal catalyst sandwiched between a thick metal support layer formed on the substrate and a bonding metal layer. The active metal catalyst is iron, cobalt, nickel or an alloy thereof; the metal support and the bonding metal independently are Au, Ag, Cu, Pd, Pt or an alloy thereof; and they can be formed by sputtering, chemical vapor deposition, physical vapor deposition, screen printing or electroplating.
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