Method and circuit for detecting movements through micro-electric-mechanical sensors, compensating parasitic capacitances and spurious movements
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United States of America Patent
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Feb 15, 2005
Grant Date -
Nov 28, 2002
app pub date -
Feb 20, 2002
filing date -
Feb 21, 2001
priority date (Note) -
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Abstract
Method for detecting movements through a micro-electric-mechanical sensor, having a fixed body and a moving mass, forming at least one first and one second detection capacitor, connected to a common node and to a first, respectively a second detection node and having a common detection capacitance at rest and a capacitive unbalance in case of a movement. The method includes the steps of: feeding the common node with a constant detection voltage of predetermined duration; generating a feedback voltage to maintain the first and the second detection node at a constant common mode voltage; generating a compensation electric quantity, inversely proportional to the common detection capacitance at least in one predetermined range; supplying the compensating electric quantity to the common node; and detecting an output quantity related to the capacitive unbalance.
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