Electrical capacitance-type diaphragm pressure sensor and a method of fabricating the same
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United States of America Patent
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Mar 1, 2005
Grant Date -
Jun 24, 2004
app pub date -
Sep 29, 2003
filing date -
Dec 4, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A compact and highly accurate pressure sensor, and a method of fabricating the same are provided by improving functioning of a diaphragm which acts as a means for sensing a fluid pressure. An electrical capacitance-type diaphragm pressure sensor for sensing a fluid pressure is fabricated by providing non-metallic strip diaphragms in opposing relation to each other; forming deposited electrodes on the opposing surfaces of the diaphragms to form a pressure receiving part (10a) of a pressure-sensing member (10); depositing a metal on the diaphragms except for an end part of the pressure-sensing member where an electrode output terminal is formed; mounting a soluble flange along an approximate border between the end part and pressure receiving part of the pressure-sensing member; applying a nickel plating (22) as a protective layer to the pressure receiving part and the periphery of the flange; removing the flange except the nickel-plated protective layer; and mounting supporting members (31, 32) in the region where the flange was removed.
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