Substrate coating unit and substrate coating method
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United States of America Patent
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Mar 1, 2005
Grant Date -
Sep 26, 2002
app pub date -
Mar 21, 2002
filing date -
Mar 22, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention is a coating unit for applying a coating solution to a substrate which includes: a discharge nozzle for reciprocating in a predetermined direction above the substrate and discharging the coating solution to the substrate; a holder for holding the substrate and horizontally movable in one direction perpendicular to the predetermined direction; and a cover for covering an upper face of the substrate when the substrate is moved in the one direction to be more forward than the discharge nozzle as viewed from a plane, wherein a lower face of the cover is inclined such as to be higher on the discharge nozzle side. According to the present invention, the cover covering the upper face of the substrate restrains a solvent from evaporating from the coating solution applied on the substrate to secure flatness of a coating film.
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