DLL circuit taking acount of external load
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United States of America Patent
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-
Mar 1, 2005
Grant Date -
N/A
app pub date -
Jan 19, 2001
filing date -
May 24, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Apparatus (10) for performing patterned cleaning of substrate surfaces (11) includes substrate (11), energetic beam (12) directed to the substrate (11), material carrier element (14) having a deposition layer (16), and a control unit (8) operating the apparatus (10) in either a 'material removal' or a 'material transfer' mode in a predetermined sequence. In the 'material removal' mode, the following steps are followed which include the material carrier element (14) from the intersection with the energy beam (12) and allowing impinging of the energy beam (12) on the surface of the substrate in a predetermined patterned fashion so that the material of the substrate is disintegrated at predetermined locations of the substrate surface (11). After the first cleaning, the control unit (18) changes the mode of the operation to the 'material transfer' by moving the material carrier element (14) into position intersecting with the energy beam (12) so that the material of the deposition layer (16) is deposited on the surface of the substrate (11).
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