Method for operating a microelectromechanical system using a stiff coupling
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United States of America Patent
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Mar 8, 2005
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N/A
app pub date -
Oct 17, 2003
filing date -
Mar 14, 2002
priority date (Note) -
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Abstract
A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.
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