Substrate-holding device for testing circuit arrangements on substrates
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United States of America Patent
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Mar 8, 2005
Issued Date -
N/A
app pub date -
May 6, 2002
filing date -
May 7, 2001
priority date (Note) -
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Abstract
A substrate-holding device is designed as a one-piece ceramic element having a number of variably heavily doped layer regions. At least one layer region is a conductive region and at least one layer region is an insulative region. A multilayer chuck structure is thereby formed which does not exhibit mechanical surface interfaces between the layers.
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