Zoom system for an illumination device
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United States of America Patent
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Mar 8, 2005
Grant Date -
May 15, 2003
app pub date -
Sep 5, 2002
filing date -
Sep 5, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
A zoom system for an illumination device of a microlithographic projection exposure system is configured in the form of a focal-length zoom lens. The lenses of the zoom system define an object plane (6) and an image plane (8) that is a Fourier transform of the object plane. The zoom system is characterized by a large expansion of the illuminated area in the image plane, where expansion factors (D) in excess of four are feasible and are obtained by employing lens groups (33, 36) that are movable over large moving ranges.
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