System and method for filtering output in mass flow controllers and mass flow meters
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United States of America Patent
Stats
-
Mar 8, 2005
Grant Date -
Oct 31, 2002
app pub date -
Apr 26, 2002
filing date -
Apr 27, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Embodiments of the present invention provide a method for filtering an indicated flow. One embodiment of the present invention can include the steps of (i) determining if the indicated flow is within an allowable deviation of a baseline, (ii) if the indicated flow is within the allowable deviation, outputting the indicated flow as the filtered indicated flow, and (iii) if the indicated flow is not within the allowable deviation, outputting a value that is within the predefined range as the filtered indicated flow. This embodiment of the present invention can also include determining if the indicated flow exceeds a buffer. If the indicated flow does not exceed the buffer, one embodiment of the present invention can continue to output the value that is within the allowable deviation.
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