Apparatus and method of increasing sram cell capacitance with metal fill

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United States of America Patent

PATENT NO 6867131
APP PUB NO 20040043554A1
SERIAL NO

10230457

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Abstract

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A static random access memory cell with metal fill to form capacitors for increasing the capacitance of the memory cell. More specifically, a semiconductor device including a structure having an upper surface and a contact surface formed at the upper surface of the structure. A dielectric material is formed over the contact surface with a first conductive node and a second conductive node extending beyond the dielectric material. Dielectric spacers are formed around the first and second conductive nodes and conductive elements are formed between the dielectric spacers. The conductive elements and spacers form capacitors without implementing additional masking steps.

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Patent Owner(s)

Patent OwnerAddress
MICRON TECHNOLOGY INC8000 SO FEDERAL WAY BOISE ID 83716-9632

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Chih-Chen Boise, ID 107 2363
Wang, Zhongze Boise, ID 157 1589

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