Rotary gas valve for pulsing a gas

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United States of America Patent

PATENT NO 6868859
APP PUB NO 20040144431A1
SERIAL NO

10354794

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A gas valve for pulsing a gas comprises a housing having at least one inlet port, an outlet port, and a selector disk mounted in the housing and comprising at least one timing slot, wherein rotation of the selector disk periodically couples at least one inlet port to the outlet port through the timing slot.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yudovsky, Joseph Campbell, CA 170 11683

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