Thin film forming apparatus, film supplier, film cassette, transport mechanism and transport method
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United States of America Patent
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Mar 22, 2005
Grant Date -
Sep 16, 2004
app pub date -
Mar 11, 2003
filing date -
Nov 13, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A center robot is fixed approximately in a central portion of a process part. A coating unit, a drying unit, a transfer unit, a peeling unit, a film supplying unit and a reversing unit are arranged around the center robot. The center robot comprises a hand-for-substrate and a hand-for-film which are allowed to directly access the respective units. Within a process part, the center robot transports a sheet film and/or a substrate between the coating unit, the drying unit, the transfer unit and the film supplying unit, and a thin film is formed on the substrate using the sheet film.
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