Pulsed operation of hall-current ion sources

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United States of America Patent

PATENT NO 6870164
SERIAL NO

09689476

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In accordance with one specific embodiment of the present invention, a Hall-current ion source is operated in a pulsed mode where the pulse duration is short compared to the time for discharge fluctuations to develop. For a reduced loss of neutral gas, the time between pulses should be less than, or about equal to, the fill time for the ionizable gas in the discharge volume of the Hall-current ion source.

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Patent Owner(s)

Patent OwnerAddress
VEECO INSTRUMENTS INC1 TERMINAL DRIVE PLAINVIEW NY 11803

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baldwin, David A Annandale, VA 14 212
Ciorneiu, Boris Great Falls, VA 9 122
Kaufman, Harold R LaPorte, CO 38 875

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