High resolution point array
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United States of America Patent
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Mar 22, 2005
Grant Date -
Jan 8, 2004
app pub date -
Apr 23, 2003
filing date -
Apr 23, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
A method for increasing a scan rate in a photolithography system by increasing a unit travel length while maintaining a minimum resolution is provided. The method includes determining the minimum resolution and a pixel spacing distance equal to the unit travel length. The method also includes calculating a window size based on the minimum resolution and the pixel spacing distance. A plurality of windows of the calculated size are established so that a pixel in a first window is offset from a pixel in a second window by the minimum resolution in a first dimension and the pixel spacing distance in a second dimension, and one of the plurality of windows is selected for projection onto a subject.
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