Structure of a structure release and a method for manufacturing the same
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United States of America Patent
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Mar 22, 2005
Grant Date -
Dec 2, 2004
app pub date -
Dec 3, 2003
filing date -
May 26, 2003
priority date (Note) -
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Abstract
A structure of a structure release and a manufacturing method are provided. The structure and manufacturing method are adapted for an interference display cell. The structure of the interference display cell includes a first electrode, a second electrode and at least one supporter. The second electrode has at least one hole and is arranged about parallel with the first electrode. The supporter is located between the first electrode and the second electrode and a cavity is formed. In the release etch process of manufacturing the structure, an etchant can pass through the hole to etch a sacrificial layer between the first and the second electrodes to form the cavity; therefore, the time needed for the process becomes shorter.
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