Liquid-phase growth process and liquid-phase growth apparatus
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United States of America Patent
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Mar 29, 2005
Grant Date -
Dec 18, 2003
app pub date -
Mar 28, 2003
filing date -
Mar 29, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A liquid-phase growth process comprising immersing a base substrate in a solution containing reactant species to be grown dissolved therein which is accommodated in a crucible and growing a crystal film on said substrate, characterized in that a capping member is kept afloat on the surface of said solution before said substrate is immersed in said solution and said capping member is subsided in said solution upon immersing said substrate in said solution. A liquid-phase growth apparatus suitable for practicing said liquid-phase growth process.
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