Method and apparatus for three-dimensional compositional mapping of heterogeneous materials
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United States of America Patent
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Mar 29, 2005
Grant Date -
May 22, 2003
app pub date -
Nov 16, 2001
filing date -
Nov 16, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Laser ablation combined with spectrometric analysis is a good tool for determining the composition of heterogeneous materials. By measuring the depth of an ablation crater at a target of a heterogeneous material, it is possible to generate a compositional profile as a function of the depth. It is also possible to generate a 3 dimensional profile by depth profiling of a plurality of craters. The depth measurement is conducted in situ and in real time so that the evolution of composition as a function of the depth can be measured. An interferometric technique with a short coherence length light is one of the preferred embodiments for measuring the depth in situ and in real time.
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