MEMS device having a trilayered beam and related methods
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United States of America Patent
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Apr 5, 2005
Grant Date -
Jun 26, 2003
app pub date -
Nov 8, 2002
filing date -
Nov 9, 2001
priority date (Note) -
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Abstract
MEMS Device Having A Trilayered Beam And Related Methods. According to one embodiment, a movable, trilayered microcomponent suspended over a substrate is provided and includes a first electrically conductive layer patterned to define a movable electrode. The first metal layer is separated from the substrate by a gap. The microcomponent further includes a dielectric layer formed on the first metal layer and having an end fixed with respect to the substrate. Furthermore, the microcomponent includes a second electrically conductive layer formed on the dielectric layer and patterned to define an electrode interconnect for electrically communicating with the movable electrode.
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