Electrothermal self-latching MEMS switch and method
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United States of America Patent
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Apr 19, 2005
Grant Date -
Jun 26, 2003
app pub date -
Nov 8, 2002
filing date -
Nov 9, 2001
priority date (Note) -
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Abstract
Electrothermal Self-Latching MEMS Switch and Method. According to one embodiment, a microscale switch having a movable microcomponent is provided and includes a substrate having a stationary contact. The switch can also include a structural layer having a movable contact positioned for contacting the stationary contact when the structural layer moves toward the substrate. An electrothermal latch attached to the structural layer and having electrical communication with the movable contact to provide current flow between the electrothermal latch and the stationary contact when the movable contact contacts the stationary contact for maintaining the movable contact in contact with the stationary contact.
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