Resonant scanner with asymmetric mass distribution
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United States of America Patent
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Apr 19, 2005
Grant Date -
May 6, 2004
app pub date -
Aug 22, 2003
filing date -
Nov 1, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
A micro-electromechanical system (MEMS) scanner may be used in a range of systems including a scanned beam display or a scanned beam image capture system. The MEMS scanner may include provision for movement or oscillation in two or more axes. A mass asymmetry is introduced to the scanner. The mass asymmetry induces an oscillation component in an axis orthogonal to a primary axis of movement. The asymmetric mass may be formed by a number of means including selective application and selective removal. In some applications, the mass may be selectively formed or removed in an array of locations. The frequency, phase, and direction of induced oscillation component may be selected.
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