Apparatus and process for annealing a multilayer body, and multilayer body of this type
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United States of America Patent
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Apr 26, 2005
Grant Date -
May 6, 2004
app pub date -
Oct 27, 2003
filing date -
Jul 30, 1999
priority date (Note) -
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Abstract
A process for annealing large-area multilayer bodies by supplying a quantity of energy at an annealing rate of at least 1.degree. C./s. To suppress temperature inhomogeneities during the annealing, different partial quantities of the quantity of energy are supplied to the layers of the multilayer body with a local and temporal resolution. The multilayer body is annealed in a container which has a base and a cover made from glass-ceramic. The process is used to produce a thin-film solar module.
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