Indexing rotatable chuck for a probe station

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6885197
APP PUB NO 20040217530A1
SERIAL NO

10856279

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A rotary chuck with indexed rotation promotes rapid rotation of a device under test and increases the productivity of a probe station on which the device is being tested. A device mounting member of a rotatable chuck is supported for rotation on a first surface of a base until a vacuum is applied drawing the device mounting member into contact with a second surface of the base and constraining the device mounting member against rotation.

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Patent Owner(s)

Patent OwnerAddress
CASCADE MICROTECH INC2430 NW 206TH AVENUE BEAVERTON OR 97006

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Harris, Daniel L Beaverton, OR 14 401
McCann, Peter R Beaverton, OR 9 258

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