Measuring apparatus, purity controller, and mixing ratio controller for insulative fluid
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United States of America Patent
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Apr 26, 2005
Grant Date -
Oct 2, 2003
app pub date -
Mar 21, 2003
filing date -
Mar 27, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A measuring apparatus correctly measures the purity, mixing ratio, and the like of an insulative (nonconductive) fluid such as ultrapure water flowing through a passage. The apparatus includes first to third sensors (19, 21, 23) to detect capacitance changes on the passage (1a) covered with an insulating resin pipe, a memory (41) to store reference capacitance changes, and a controller (35) to compare the detected capacitance changes with the stored reference capacitance changes, measure a purity of the insulative fluid flowing through the passage, and control the purity of the insulative fluid.
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