Apparatus and method for measuring thickness and composition of multi-layered sample
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United States of America Patent
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Apr 26, 2005
Grant Date -
Feb 13, 2003
app pub date -
Aug 6, 2002
filing date -
Aug 7, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus determines the thickness and composition of a multi-layered sample comprised of at least a copper layer and a tin-copper alloy plating layer disposed on the copper layer. The sample is irradiated with primary X-rays and an energy-dispersive X-ray detector detects fluorescent X-rays and diffracted X-rays emitted from the sample. An X-ray spectrum of the detected fluorescent X-rays and diffracted X-rays is generated. The concentration of copper in the tin-copper alloy plating layer of the sample is determined utilizing peak intensities of the diffracted X-rays in the X-ray spectrum. The thickness of the tin-copper alloy plating layer of the sample is determined utilizing peak intensities of the fluorescent X-rays in the X-ray spectrum and the determined copper concentration.
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