Monolithic printhead with self-aligned groove and relative manufacturing process
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United States of America Patent
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-
May 3, 2005
Grant Date -
Aug 21, 2003
app pub date -
Aug 22, 2001
filing date -
Aug 23, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
A monolithic thermal ink jet printhead (40) comprising a groove (45), a plurality of chambers (74) and nozzles (56) is manufactured by means of steps of: (203, 205) partially etching the groove (45) by means of a 'dry' process and a 'wet' process; (210) depositing a plurality of sacrificial layers (54); (212) obtaining a plurality of casts (156); (216) completing the etching of the groove (45) by means of an electrochemical process; and (220) removing the casts (156) and the sacrificial layers (54) in such a way as to obtain a plurality of nozzles (56) and chambers (74).
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