US Patent No: 6,888,750

Number of patents in Portfolio can not be more than 2000

Nonvolatile memory on SOI and compound semiconductor substrates and method of fabrication

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ALSO PUBLISHED AS: 20010055838
ATTORNEY / AGENT: (SPONSORED)
 

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Abstract

A nonvolatile memory array is provided. The array includes an array of nonvolatile memory devices, at least one driver circuit, and a substrate. The at least one driver circuit is not located in a bulk monocrystalline silicon substrate. The at least one driver circuit may be located in a silicon on insulator substrate or in a compound semiconductor substrate.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
SANDISK 3D LLCMILPITAS, CA548

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Johnson, Mark G Los Altos, CA 62 4026
Knall, N Johan Sunnyvale, CA 44 1645
Kouznetsov, Igor G Santa Clara, CA 11 313
Petti, Christopher J Mountain View, CA 129 1493
Walker, Andrew J Mountain View, CA 75 1344

Cited Art

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Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
MACRONIX INTERNATIONAL CO., LTD. (183)
7,385,235 Spacer chalcogenide memory device 80 2004
7,608,503 Side wall active pin memory and manufacturing method 7 2005
7,507,986 Thermal isolation for an active-sidewall phase change memory cell 41 2006
7,432,206 Self-aligned manufacturing method, and manufacturing method for thin film fuse phase change ram 2 2006
7,394,088 Thermally contained/insulated phase change memory device and method (combined) 95 2006
7,956,358 I-shaped phase change memory cell with thermal isolation 1 2006
7,635,855 I-shaped phase change memory cell 9 2006
7,825,396 Self-align planerized bottom electrode phase change memory and manufacturing method 0 2006
7,471,555 Thermally insulated phase change memory device 4 2006
7,599,217 Memory cell device and manufacturing method 3 2006
8,062,833 Chalcogenide layer etching method 0 2006
7,910,907 Manufacturing method for pipe-shaped electrode phase change memory 1 2006
7,397,060 Pipe shaped phase change memory 81 2006
7,554,144 Memory device and manufacturing method 5 2006
7,928,421 Phase change memory cell with vacuum spacer 1 2006
7,829,876 Vacuum cell thermal isolation for a phase change memory device 4 2006
7,479,649 Vacuum jacketed electrode for phase change memory element 54 2006
7,449,710 Vacuum jacket for phase change memory element 77 2006
7,521,364 Surface topology improvement method for plug surface areas 0 2006
7,456,421 Vertical side wall active pin structures in a phase change memory and manufacturing methods 4 2006
8,129,706 Structures and methods of a bistable resistive random access memory 0 2006
7,608,848 Bridge resistance random access memory device with a singular contact structure 29 2006
7,605,079 Manufacturing method for phase change RAM with electrode layer process 2 2006
7,514,367 Method for manufacturing a narrow structure on an integrated circuit 0 2006
7,423,300 Single-mask phase change memory element 81 2006
7,820,997 Resistor random access memory cell with reduced active area and reduced contact areas 0 2006
7,732,800 Resistor random access memory cell with L-shaped electrode 0 2006
7,491,599 Gated diode nonvolatile memory process 2 2006
7,459,717 Phase change memory cell and manufacturing method 9 2006
7,414,258 Spacer electrode small pin phase change memory RAM and manufacturing method 2 2006
8,237,140 Self-aligned, embedded phase change RAM 0 2006
7,642,539 Thin film fuse phase change cell with thermal isolation pad and manufacturing method 0 2006
7,560,337 Programmable resistive RAM and manufacturing method 19 2006
7,696,506 Memory cell with memory material insulation and manufacturing method 1 2006
7,785,920 Method for making a pillar-type phase change memory element 1 2006
7,741,636 Programmable resistive RAM and manufacturing method 1 2006
7,450,411 Phase change memory device and manufacturing method 2 2006
7,595,218 Programmable resistive RAM and manufacturing method 2 2006
7,531,825 Method for forming self-aligned thermal isolation cell for a variable resistance memory array 2 2006
7,442,603 Self-aligned structure and method for confining a melting point in a resistor random access memory 5 2006
7,598,512 Thin film fuse phase change cell with thermal isolation layer and manufacturing method 2 2006
7,772,581 Memory device having wide area phase change element and small electrode contact area 8 2006
7,504,653 Memory cell device with circumferentially-extending memory element 15 2006
7,811,890 Vertical channel transistor structure and manufacturing method thereof 4 2006
7,907,450 Methods and apparatus for implementing bit-by-bit erase of a flash memory device 1 2006
7,510,929 Method for making memory cell device 1 2006
7,863,655 Phase change memory cells with dual access devices 1 2006
7,527,985 Method for manufacturing a resistor random access memory with reduced active area and reduced contact areas 1 2006
7,388,771 Methods of operating a bistable resistance random access memory with multiple memory layers and multilevel memory states 4 2006
8,067,762 Resistance random access memory structure for enhanced retention 0 2006
7,816,661 Air cell thermal isolation for a memory array formed of a programmable resistive material 0 2006
7,682,868 Method for making a keyhole opening during the manufacture of a memory cell 0 2006
7,476,587 Method for making a self-converged memory material element for memory cell 13 2006
7,697,316 Multi-level cell resistance random access memory with metal oxides 24 2006
7,903,447 Method, apparatus and computer program product for read before programming process on programmable resistive memory cell 0 2006
8,344,347 Multi-layer electrode structure 0 2006
7,688,619 Phase change memory cell and manufacturing method 33 2006
7,718,989 Resistor random access memory cell device 2 2006
7,786,460 Phase change memory device and manufacturing method 23 2007
7,440,315 Method, apparatus and computer program product for stepped reset programming process on programmable resistive memory cell 7 2007
7,433,226 Method, apparatus and computer program product for read before programming process on multiple programmable resistive memory cell 7 2007
7,483,292 Memory cell with separate read and program paths 2 2007
8,008,643 Phase change memory cell with heater and method for fabricating the same 0 2007
7,619,237 Programmable resistive memory cell with self-forming gap 2 2007
7,534,647 Damascene phase change RAM and manufacturing method 1 2007
7,956,344 Memory cell with memory element contacting ring-shaped upper end of bottom electrode 0 2007
7,786,461 Memory structure with reduced-size memory element between memory material portions 4 2007
7,755,076 self align side wall active phase change memory 7 2007
7,569,844 Memory cell sidewall contacting side electrode 21 2007
7,514,334 Thin film plate phase change RAM circuit and manufacturing method 43 2007
7,463,512 Memory element with reduced-current phase change element 5 2007
7,701,759 Memory cell device and programming methods 8 2007
7,483,316 Method and apparatus for refreshing programmable resistive memory 1 2007
7,884,342 Phase change memory bridge cell 0 2007
7,729,161 Phase change memory with dual word lines and source lines and method of operating same 3 2007
7,696,503 Multi-level memory cell having phase change element and asymmetrical thermal boundary 10 2007
7,737,488 Blocking dielectric engineered charge trapping memory cell with high speed erase 5 2007
8,178,386 Phase change memory cell array with self-converged bottom electrode and method for manufacturing 0 2007
7,642,125 Phase change memory cell in via array with self-aligned, self-converged bottom electrode and method for manufacturing 3 2007
7,663,135 Memory cell having a side electrode contact 4 2007
7,551,473 Programmable resistive memory with diode structure 12 2007
7,535,756 Method to tighten set distribution for PCRAM 8 2007
7,919,766 Method for making self aligning pillar memory cell device 1 2007
7,888,707 Gated diode nonvolatile memory process 0 2007
7,804,083 Phase change memory cell including a thermal protect bottom electrode and manufacturing methods 0 2007
7,646,631 Phase change memory cell having interface structures with essentially equal thermal impedances and manufacturing methods 1 2007
7,579,613 Thin film fuse phase change RAM and manufacturing method 9 2007
7,639,527 Phase change memory dynamic resistance test and manufacturing methods 1 2008
7,884,343 Phase change memory cell with filled sidewall memory element and method for fabricating the same 3 2008
7,879,643 Memory cell with memory element contacting an inverted T-shaped bottom electrode 2 2008
7,879,645 Fill-in etching free pore device 7 2008
7,619,311 Memory cell device with coplanar electrode surface and method 9 2008
8,158,965 Heating center PCRAM structure and methods for making 0 2008
7,932,101 Thermally contained/insulated phase change memory device and method 1 2008
8,084,842 Thermally stabilized electrode structure 1 2008
7,791,057 Memory cell having a buried phase change region and method for fabricating the same 4 2008
7,701,750 Phase change device having two or more substantial amorphous regions in high resistance state 7 2008
7,586,778 Methods of operating a bistable resistance random access memory with multiple memory layers and multilevel memory states 22 2008
8,415,651 Phase change memory cell having top and bottom sidewall contacts 0 2008
7,642,123 Thermally insulated phase change memory manufacturing method 3 2008
7,867,815 Spacer electrode small pin phase change RAM and manufacturing method 0 2008
7,777,215 Resistive memory structure with buffer layer 7 2008
7,932,506 Fully self-aligned pore-type memory cell having diode access device 1 2008
7,995,384 Electrically isolated gated diode nonvolatile memory 0 2008
7,903,457 Multiple phase change materials in an integrated circuit for system on a chip application 3 2008
7,842,536 Vacuum jacket for phase change memory element 1 2008
7,719,913 Sensing circuit for PCRAM applications 1 2008
8,243,494 Self-aligned structure and method for confining a melting point in a resistor random access memory 0 2008
8,324,605 Dielectric mesh isolated phase change structure for phase change memory 0 2008
7,897,954 Dielectric-sandwiched pillar memory device 0 2008
7,932,129 Vertical side wall active pin structures in a phase change memory and manufacturing methods 0 2008
8,036,014 Phase change memory program method without over-reset 3 2008
7,902,538 Phase change memory cell with first and second transition temperature portions 0 2008
7,638,359 Method for making a self-converged void and bottom electrode for memory cell 2 2008
7,749,854 Method for making a self-converged memory material element for memory cell 0 2008
7,687,307 Vacuum jacketed electrode for phase change memory element 0 2008
7,999,295 Stacked thin film transistor, non-volatile memory devices and methods for fabricating the same 0 2008
7,869,270 Set algorithm for phase change memory cell 2 2008
8,093,661 Integrated circuit device with single crystal silicon on silicide and manufacturing method 0 2009
8,089,137 Integrated circuit memory with single crystal silicon on silicide driver and manufacturing method 1 2009
7,923,285 Method for forming self-aligned thermal isolation cell for a variable resistance memory array 1 2009
8,107,283 Method for setting PCRAM devices 2 2009
8,030,635 Polysilicon plug bipolar transistor for phase change memory 2 2009
7,910,906 Memory cell device with circumferentially-extending memory element 0 2009
8,084,760 Ring-shaped electrode and manufacturing method for same 0 2009
8,173,987 Integrated circuit 3D phase change memory array and manufacturing method 0 2009
8,077,505 Bipolar switching of phase change device 0 2009
8,097,871 Low operational current phase change memory structures 0 2009
8,134,857 Methods for high speed reading operation of phase change memory and device employing same 1 2009
7,933,139 One-transistor, one-resistor, one-capacitor phase change memory 3 2009
7,972,893 Memory device manufacturing method 0 2009
8,350,316 Phase change memory cells having vertical channel access transistor and memory plane 0 2009
7,968,876 Phase change memory cell having vertical channel access transistor 1 2009
8,158,963 Programmable resistive RAM and manufacturing method 0 2009
8,406,033 Memory device and method for sensing and fixing margin cells 0 2009
8,064,247 Rewritable memory device based on segregation/re-absorption 0 2009
8,110,822 Thermal protect PCRAM structure and methods for making 1 2009
7,894,254 Refresh circuitry for phase change memory 2 2009
7,924,600 Methods of operating a bistable resistance random access memory with multiple memory layers and multilevel memory states 1 2009
8,198,619 Phase change memory cell structure 0 2009
8,064,248 2T2R-1T1R mix mode phase change memory array 1 2009
8,110,429 Bridge resistance random access memory device and method with a singular contact structure 0 2009
7,879,692 Programmable resistive memory cell with self-forming gap 0 2009
7,972,895 Memory cell device with coplanar electrode surface and method 1 2009
7,993,962 I-shaped phase change memory cell 0 2009
8,143,612 Phase change memory cell in via array with self-aligned, self-converged bottom electrode and method for manufacturing 0 2009
8,062,923 Thin film fuse phase change cell with thermal isolation pad and manufacturing method 0 2009
7,893,418 Phase change memory cell having interface structures with essentially equal thermal impedances and manufacturing methods 0 2009
7,964,863 Memory cell having a side electrode contact 0 2009
7,929,340 Phase change memory cell and manufacturing method 0 2010
7,964,468 Multi-level memory cell having phase change element and asymmetrical thermal boundary 0 2010
8,238,149 Methods and apparatus for reducing defect bits in phase change memory 0 2010
8,111,541 Method of a multi-level cell resistance random access memory with metal oxides 0 2010
7,920,415 Memory cell device and programming methods 0 2010
8,059,449 Phase change device having two or more substantial amorphous regions in high resistance state 0 2010
8,363,463 Phase change memory having one or more non-constant doping profiles 0 2010
8,178,387 Methods for reducing recrystallization time for a phase change material 0 2010
8,178,405 Resistor random access memory cell device 0 2010
7,978,509 Phase change memory with dual word lines and source lines and method of operating same 0 2010
8,343,840 Blocking dielectric engineered charge trapping memory cell with high speed erase 0 2010
8,080,440 Resistor random access memory cell with L-shaped electrode 0 2010
8,178,388 Programmable resistive RAM and manufacturing method 1 2010
8,237,148 self align side wall active phase change memory 0 2010
8,310,864 Self-aligned bit line under word line memory array 0 2010
7,964,437 Memory device having wide area phase change element and small electrode contact area 0 2010
7,943,920 Resistive memory structure with buffer layer 0 2010
8,008,114 Phase change memory device and manufacturing method 0 2010
7,875,493 Memory structure with reduced-size memory element between memory material portions 0 2010
8,039,392 Resistor random access memory cell with reduced active area and reduced contact areas 1 2010
8,395,935 Cross-point self-aligned reduced cell size phase change memory 0 2010
8,143,089 Self-align planerized bottom electrode phase change memory and manufacturing method 0 2010
8,097,487 Method for making a phase change memory device with vacuum cell thermal isolation 1 2010
8,110,430 Vacuum jacket for phase change memory element 0 2010
8,110,456 Method for making a self aligning memory device 0 2010
8,094,488 Set algorithm for phase change memory cell 0 2010
8,263,960 Phase change memory cell with filled sidewall memory element and method for fabricating the same 0 2010
8,315,088 Multiple phase change materials in an integrated circuit for system on a chip application 0 2011
8,228,721 Refresh circuitry for phase change memory 0 2011
8,222,071 Method for making self aligning pillar memory cell device 0 2011
8,313,979 Phase change memory cell having vertical channel access transistor 0 2011
8,324,681 Stacked non-volatile memory device and methods for fabricating the same 0 2011
8,237,144 Polysilicon plug bipolar transistor for phase change memory 0 2011
8,293,600 Thermally stabilized electrode structure 0 2011
 
SANDISK 3D LLC (18)
7,177,183 Multiple twin cell non-volatile memory array and logic block structure and method therefor 8 2003
7,129,538 Dense arrays and charge storage devices 36 2004
7,615,436 Two mask floating gate EEPROM and method of making 2 2004
6,992,349 Rail stack array of charge storage devices and method of making same 29 2004
7,177,169 Word line arrangement having multi-layer word line segments for three-dimensional memory array 21 2005
7,106,652 Word line arrangement having multi-layer word line segments for three-dimensional memory array 12 2005
7,433,233 NAND memory array incorporating capacitance boosting of channel regions in unselected memory cells and method for operation of same 10 2007
7,773,446 Methods and apparatus for extending the effective thermal operating range of a memory 1 2007
7,656,734 Methods and apparatus for extending the effective thermal operating range of a memory 42 2007
7,655,509 Silicide-silicon oxide-semiconductor antifuse device and method of making 1 2007
7,633,829 Hierarchical decoding of dense memory arrays using multiple levels of multiple-headed decoders 7 2007
7,859,884 Structure and method for biasing phase change memory array for reliable writing 8 2007
7,825,455 Three terminal nonvolatile memory device with vertical gated diode 1 2009
7,915,095 Silicide-silicon oxide-semiconductor antifuse device and method of making 0 2010
7,994,068 Method for fabricating a 3-D integrated circuit using a hard mask of silicon-oxynitride on amorphous carbon 0 2010
8,004,919 Methods and apparatus for extending the effective thermal operating range of a memory 0 2010
8,374,051 Three dimensional memory system with column pipeline 0 2011
8,385,141 Structure and method for biasing phase change memory array for reliable writing 0 2011
 
MICRON TECHNOLOGY, INC. (14)
7,410,867 Vertical transistor with horizontal gate layers 3 2002
7,189,634 Edge intensive antifuse 0 2003
7,183,611 SRAM constructions, and electronic systems comprising SRAM constructions 5 2003
7,210,224 Method for forming an antifuse 2 2004
7,115,939 Floating gate transistor with horizontal gate layers stacked next to vertical body 2 2004
7,279,772 Edge intensive antifuse and method for making the same 0 2004
7,235,858 Edge intensive antifuse and method for making the same 0 2004
7,244,981 Scalable high performance non-volatile memory cells using multi-mechanism carrier transport 1 2005
7,358,131 Methods of forming SRAM constructions 1 2006
7,432,562 SRAM devices, and electronic systems comprising SRAM devices 1 2006
7,579,240 Method of making vertical transistor with horizontal gate layers 1 2006
7,491,608 Vertical transistor with horizontal gate layers 2 2006
7,269,898 Method for making an edge intensive antifuse 0 2006
7,553,735 Scalable high performance non-volatile memory cells using multi-mechanism carrier transport 0 2007
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (5)
7,521,950 Wafer level I/O test and repair enabled by I/O layer 3 2005
7,737,003 Method and structure for optimizing yield of 3-D chip manufacture 0 2005
7,999,377 Method and structure for optimizing yield of 3-D chip manufacture 0 2008
7,825,479 Electrical antifuse having a multi-thickness dielectric layer 0 2008
8,299,519 Read transistor for single poly non-volatile memory using body contacted SOI device 0 2010
 
QIMONDA AG (5)
7,265,381 Opto-electronic memory element on the basis of organic metalloporphyrin molecules 0 2004
7,515,461 Current compliant sensing architecture for multilevel phase change memory 48 2007
8,138,028 Method for manufacturing a phase change memory device with pillar bottom electrode 0 2007
8,030,634 Memory array with diode driver and method for fabricating the same 1 2008
7,825,398 Memory cell having improved mechanical stability 0 2008
 
SANDISK CORPORATION (4)
7,307,268 Structure and method for biasing phase change memory array for reliable writing 34 2005
7,525,137 TFT mask ROM and method for making same 3 2006
7,888,200 Embedded memory in a CMOS circuit and methods of forming the same 0 2007
7,868,388 Embedded memory in a CMOS circuit and methods of forming the same 0 2007
 
SAMSUNG ELECTRONICS CO., LTD. (3)
8,159,017 Non-volatile memory device and method of manufacturing the same 0 2009
8,064,254 Columnar non-volatile memory devices with auxiliary transistors and methods of operating the same 1 2009
8,379,480 Non-volatile memory device and method of manufacturing the same 0 2012
 
HGST NETHERLANDS B.V. (2)
7,652,915 High density spin torque three dimensional (3D) memory arrays addressed with microwave current 2 2006
8,422,284 High density spin torque three dimensional (3D) memory arrays addressed with microwave current 0 2009
 
YAKIMISHU CO. LTD., LLC (2)
7,112,994 Three dimensional integrated circuits 20 2004
8,429,585 Three dimensional integrated circuits 0 2006
 
KABUSHIKI KAISHA TOSHIBA (1)
7,781,807 Non-volatile semiconductor storage device 2 2007
 
PANASONIC CORPORATION (1)
7,667,299 Circuit board and method for mounting chip component 1 2005
 
SANDDISK 3D LLC (1)
7,329,565 Silicide-silicon oxide-semiconductor antifuse device and method of making 5 2004

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