Scheduling method and program for a substrate processing apparatus
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United States of America Patent
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May 3, 2005
Grant Date -
Nov 21, 2002
app pub date -
May 7, 2002
filing date -
May 16, 2001
priority date (Note) -
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Abstract
A method of preparing a schedule for a substrate processing apparatus. A plurality of lots are processed by the substrate processing apparatus including a plurality of processing sections for processing substrates. An order of processing the lots is determined based on a recipe including a plurality of processing steps for successively processing the lots in the processing sections. The method includes, in determining the processing order, a step of allocating a first processing step for one of the lots, and thereafter allocating, as a next processing step, one of next processing steps for the lots preceded by a processing step having the earliest
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